US 11,437,540 B2
COMPONENT HAVING METAL CARRIER LAYER AND LAYER THAT COMPENSATES FOR INTERNAL MECHANICAL STRAINSGeneral
US 11,437,540 B2
COMPONENT HAVING METAL CARRIER LAYER AND LAYER THAT COMPENSATES FOR INTERNAL MECHANICAL STRAINS
Tech Center:
2800 Semiconductors/Memory, Circuits/Measuring and Testing, Optics/Photocopying, Printing/Measuring and Testing
Examiner:
Quoc D Hoang
Art Unit:
2892 Semiconductors/Memory
Agent:
Inventors:
Isabel Otto; Korbinian Perzlmaier
Assignee:
Priority:
07/21/17
Filed:
01/13/21
Granted:
09/06/22
Expiration:
07/21/37
Cooperative Patent Classification (CPC)
H10H10H20/8585H10H