US 7,364,268 B2
Nozzle members, compositions and methods for micro-fluid ejection headsGeneral
US 7,364,268 B2
Nozzle members, compositions and methods for micro-fluid ejection heads
Tech Center:
2800 Semiconductors/Memory, Circuits/Measuring and Testing, Optics/Photocopying, Printing/Measuring and Testing
Examiner:
Juanita D. Stephens
Art Unit:
2853 Printing/Measuring and Testing
Agent:
Leudeka, Neely & Graham PC
Inventors:
Brian C. Hart; Gary A. Holt; Melissa M. Waldeck; Sean T. Weaver; Gary R. Williams
Assignee:
Priority:
09/30/05
Filed:
09/30/05
Granted:
04/29/08
Expiration:
06/28/26
Abstract
An improved photoimaged nozzle plate for a micro-fluid ejection head, a micro-fluid ejection head containing the nozzle plate, and methods for making a micro-fluid ejection head. The improved nozzle plate is provided by a photoresist nozzle plate layer applied to a thick film layer on a semiconductor substrate containing fluid ejector actuators. The photoresist nozzle plate layer has a plurality of nozzle holes therein. Each of the nozzle holes are formed in the nozzle plate layer from an exit surface of the nozzle plate layer to an entrance surface of the nozzle plate layer. Each of the nozzle holes has a reentrant hole profile with a wall angle greater than about 4° up to about 30° measured from an axis orthogonal to a plane defined by the exit surface of the nozzle plate layer.
Cooperative Patent Classification (CPC)
B41B41J2/1631B41J