US 7,808,396 B2
Substrate processing apparatusGeneral
US 7,808,396 B2
Substrate processing apparatus
Tech Center:
2600 Communications
Examiner:
Van T. Trieu
Art Unit:
2612 Computer Graphic Processing, 3D Animation, Display Color Attribute, Object Processing, Hardware and Memory
Agent:
Inventors:
Tsukasa Iida; Akihiko Yoneda; Kaori Inoshima
Assignee:
Priority:
09/26/05
Filed:
09/26/06
Granted:
10/05/10
Expiration:
08/27/27
Abstract
It is intended to provide a substrate processing apparatus capable of reliably informing a running state of the apparatus. The substrate processing apparatus 100 having a signal indicator for indicating the running state, including a signal indicator 306 capable of setting at least one operation condition under which the signal indicator 306 operates as well as of operating under any one of a plurality of operation conditions and a display unit 314 capable of displaying that a cause of the operation is any one of the operation conditions during the operation of the signal indicator 306.
Cooperative Patent Classification (CPC)
G05G05B2219/45031G05BH01L21/67253H01L