US 7,812,505 B2
Piezoelectric microspeaker using microelectromechanical systems and method of manufacturing the same
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US 7,812,505 B2
Piezoelectric microspeaker using microelectromechanical systems and method of manufacturing the same
Tech Center:
2800 Semiconductors/Memory, Circuits/Measuring and Testing, Optics/Photocopying, Printing/Measuring and Testing
Examiner:
Thomas M Dougherty
Art Unit:
2837 Electrical Circuits and Systems
Agent:
AMPACC Law Group, PLLC
Inventors:
Sang Kyun Lee; Sung Q Lee; Hye Jin Kim; Jae Woo Lee; Kang Ho Park; Jong Dae Kim
Assignee:
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
Priority:
09/29/08
Filed:
09/29/08
Granted:
10/12/10
Expiration:
01/23/29
Abstract
A piezoelectric microspeaker using microelectromechanical systems (MEMS) and a method of manufacturing the same are provided. The piezoelectric microspeaker includes a piezoelectric layer disposed on an elastic thin layer, and a resonance change unit patterned on one of a bottom surface of the elastic thin layer and a top surface of the piezoelectric layer.
Cooperative Patent Classification (CPC)
Y10Y10T29/42Y10TH10N30/2047H10NH04R31/006H04R

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