US 8,114,697 B2
Piezoelectric microphone, speaker, microphone-speaker integrated device and manufacturing method thereofGeneral
US 8,114,697 B2
Piezoelectric microphone, speaker, microphone-speaker integrated device and manufacturing method thereof
Tech Center:
2800 Semiconductors/Memory, Circuits/Measuring and Testing, Optics/Photocopying, Printing/Measuring and Testing
Examiner:
Lex Malsawma
Art Unit:
2892 Semiconductors/Memory
Agent:
Inventors:
Hye Jin KIM; Sung Q Lee; Sang Kyun Lee; Jae Woo Lee; Kang Ho Park; Jong Dae Kim
Priority:
08/20/08
Filed:
08/20/08
Granted:
02/14/12
Expiration:
10/18/30
Abstract
A piezoelectric microphone, a speaker, a microphone-speaker integrated device and a manufacturing method thereof are provided. The microphone-speaker integrated device includes a silicon substrate and an insulating layer deposited on the silicon substrate; a piezoelectric plate formed on the insulating layer; and a mating electrode formed on the piezoelectric plate. The mating electrode is patterned with a polarity arrayed in series.
Cooperative Patent Classification (CPC)
H04H04R17/025H04R